Local Defect Density in Polycrystalline High-k Dielectrics: CAFM-Based Evaluation Methodology and Impact on MOSFET Variability

  1. Couso, C.
  2. Porti, M.
  3. Martin-Martinez, J.
  4. Garcia-Loureiro, A.J.
  5. Seoane, N.
  6. Nafria, M.
Journal:
IEEE Electron Device Letters

ISSN: 0741-3106

Year of publication: 2017

Volume: 38

Issue: 5

Pages: 637-640

Type: Article

DOI: 10.1109/LED.2017.2680545 GOOGLE SCHOLAR
Data source: Scopus