Comparison of Fin-Edge Roughness and Metal Grain Work Function Variability in InGaAs and Si FinFETs
- Seoane, N.
- Indalecio, G.
- Aldegunde, M.
- Nagy, D.
- Elmessary, M.A.
- García-Loureiro, A.J.
- Kalna, K.
ISSN: 0018-9383
Year of publication: 2016
Volume: 63
Issue: 3
Pages: 1209-1216
Type: Article