Scaling/LER study of Si GAA nanowire FET using 3D Finite Element Monte Carlo simulations

  1. Elmessary, M.A.
  2. Nagy, D.
  3. Aldegunde, M.
  4. Seoane, N.
  5. Indalecio, G.
  6. Lindberg, J.
  7. Dettmer, W.
  8. Peric, D.
  9. Garcia-Loureiro, A.J.
  10. Kalna, K.
Proceedings:
2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2016

ISBN: 9781467386098

Year of publication: 2016

Pages: 52-55

Type: Conference paper

DOI: 10.1109/ULIS.2016.7440050 GOOGLE SCHOLAR
Data source: Scopus