PFPE-based materials for the fabrication of micro- and nano-optical components

  1. Gómez, M.
  2. Lazzari, M.
Journal:
Microelectronic Engineering

ISSN: 0167-9317

Year of publication: 2012

Volume: 97

Pages: 208-211

Type: Article

DOI: 10.1016/J.MEE.2012.03.035 GOOGLE SCHOLAR