Scaling Challenges of Nanosheet Field-Effect Transistors into Sub-2 nm Nodes

1. Alabdullah, M.G.K.
2. Elmessary, M.A.
3. Nagy, D.
4. Seoane, N.
5. Garcia-Loureiro, A.J.
6. Kalna, K.

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DOI: 10.1109/JEDS.2024.3416200 GOOGLE SCHOLAR lock_openOpen access editor

Data source: Scopus